Field Service Engineer I

at Oxford Instruments in Chicago, Illinois, United States Job Description Apply now Field Service Engineer I Date: Apr 4, 2026 Location: Chicago, IL, US Job Function: Technical Business Unit: Plasma Technology Field Service Engineer - Plasma Technology About Oxford Instruments Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world Location REMOTE - North America -based - Midwest -Chicago,USA. Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites. The Role Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands-on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You'll collaborate across teams, escalate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you'll play a critical role in driving customer satisfaction and advancing cutting-edge semiconductor technologies. Key Responsibilities * System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness. * Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks. * Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands-on training. Empower customers to operate and maintain systems confidently across key processes. * Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime. * Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput. Required Qualifications & Experience*Education & Industry Background o Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field. o Equivalent hands-on experience in semiconductor equipment service may substitute. o3-5yearsof field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems. o Familiarity with cleanroom operations and safety protocols. * Vacuum & Power Systems o Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps. o Skilled in troubleshooting 208V electrical systems and 24V control subsystems Experience with RF power components and pneumatically driven * Diagnostics & Technical ToolsoProficient with diagnostic instruments: *Vacuum leak detectors * RF power meters * DVMs, LCR meters, multimeters, megohm meters o Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.* Process Knowledgeo Strong understanding of RF theory and inductively coupled plasma (ICP) systems. o Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD. * Physical & Travel Requirementso Hold a valid driver's license and safe driving record, passport, and ability to travel independently. o Must be physically agile and comfortable working in confined or awkward spaces. o Capable of independently lifting and handling equipment weighing up to 50 lbs. o Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday Preferred Skills & Attributes* Platform & Component Experience o Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components. o Knowledge of calibration and optimization of APCs and MFCs. *Work Ethic & Collaborationo Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire. o Proactive problem-solving and openness to continuous learning. o Effective communicator with strong listening... For full info follow application link. All qualified applicants will receive consideration for employment without regard to race, color, religion, sex, sexual orientation, gender identity, national origin, disability, or status as a protected veteran. To view full details and how to apply, please login or create a Job Seeker account